In the actual set-up, the probe is equipped with a 50 mm lens which sets a quota resolution of nearly 1 m and a dynamic range of 8 mm at a stand-off distance about 40 mm.

The scanning device is composed of two motorized high-precision (0.1 m) linear stages, perpendicularly assembled.

The system allows measurement on a maximum area of about 280 x 280 mm².

The instrument has a maximum transversal resolution of 20 m with an acquisition speed ranging from 100 to 400 point/s, depending on the set spatial sampling frequency. The micro-profilometer enables measurements on surfaces with almost any reflectivity, with an incident angle up to 85°, very close to grazing incidence.

Even very small details can be detected, as, for example, holes smaller than 1 mm diameter and 25:1 ratio between quota and diameter.
Moreover the instrument, not sensitive to colour gradients, is suitable for surveys of very detailed surfaces characterized by high chromatic contrast.

These characteristics, combined with co-linearity, allow the measuring of thin grooves and deep holes.